Ho utloisisa Theknoloji ea Thin-Filimi
Theknoloji ea filimi e tšesaane e kenyelletsa ho beha likarolo tse mosesane tsa thepa (hangata ho tloha ho li-nanometer tse seng kae ho isa ho tse botenya ba li-micrometer tse seng kae) holim'a substrate. Likarolo tsena li ka etsoa ka tšepe, li-semiconductors, li-insulators kapa lisebelisoa tse ling, 'me li sebelisoa ho theha likarolo tsa elektronike tse sebetsang. Theknoloji ena e bohlokoa haholo ha ho etsoa lisebelisoa tsa elektroniki kaha e thusa ho nepahala le ho sebetsa ha likarolo. Thin-film deposition hangata e etsoa ka vapor deposition (PVD) kapa chemical vapor deposition (CVD), ho netefatsa boleng le ts'ebetso ea sehlahisoa sa ho qetela.
Tsoelo-pele ea theknoloji ea lifilimi tse tšesaane e qalile bohareng ba lekholo la bo20 la lilemo ha ho ne ho e-na le tsoelo-pele e khōlō ho saense ea lintho tse bonahalang le mekhoa ea ho kenya li-vacuum. Qalong, theknoloji ea lifilimi tse tšesaane e ne e sebelisoa haholo indastering ea semiconductor bakeng sa ho etsa li-transistors le li-circuits tse kopaneng. Ha theknoloji e ntse e tsoela pele 'me tlhokahalo e ntse e eketseha, mefuta e mengata ea tšebeliso ea theknoloji ea filimi e tšesaane e ile ea eketseha ka potlako. Kajeno, e sebelisoa haholo ho etsa li-sensor, li-optical coatings, lisele tsa letsatsi, li-hard disk drive, le li-anti-corrosion coatings, har'a tse ling. Ka mohlala, ha ho etsoa li-sensor, theknoloji ea filimi e tšesaane e sebelisoa ho hlahisa li-sensor tsa khatello ea maikutlo, li-sensor tsa khase, le li-sensor tsa mocheso, tse khetholloang ka kutloisiso e phahameng le ho nepahala. Ho feta moo, ts'ebeliso ea theknoloji ea lifilimi tse tšesaane ho litsamaiso tsa microelectromechanical (MEMS) le nanotechnology le eona e ntse e hola, e fana ka tšehetso ea bohlokoa bakeng sa boqapi le nts'etsopele mafapheng ana.
Likarolo tsa bohlokoa tsa theknoloji ea lifilimi tse tšesaane li kenyelletsa ho nepahala ha eona ho phahameng, ho feto-fetoha ha maemo, le bokhoni ba ho kopanya mesebetsi e mengata. Ho nepahala ho phahameng ho lumella theknoloji ea filimi e tšesaane ho fihlela litekanyo tse nepahetseng haholo ka har'a mefuta e nyane ea boholo, e leng bohlokoa bakeng sa lisebelisoa tse kang li-sensor tsa khatello tse hlokang ho boloka litekanyo tse nepahetseng tsa khatello tlas'a maemo a fapaneng a tikoloho. Ho tenyetseha ha lifilimi tse tšesaane ho li lumella ho ikamahanya le li-substrates tse fapaneng le litlhoko tsa ts'ebeliso, ho nolofalletsa ho beoa ho li-substrates tse fapaneng joalo ka silicon, khalase, tšepe le lipolasetiki, ka hona li fihlela mesebetsi e mengata. Ho feta moo, theknoloji ea filimi e tšesaane e ka kopanngoa le mahlale a mang le lisebelisoa ho etsa lisebelisoa tse nang le likarolo tse ngata tse nang le mesebetsi e mengata. Ka mohlala, ho kopanya theknoloji ea filimi e tšesaane le MEMS ho ka hlahisa li-sensor tse nyenyane tsa khatello tse nyenyane feela le tse bobebe empa hape li na le kutloelo-bohloko le tse ka tšeptjoang.
Theknoloji ea filimi e tšesaane e ka boela ea kopanya mesebetsi e mengata ho sesebelisoa se le seng, ho bolelang hore ho lemoha, ho lekanya, le ho sebetsa ha data ho ka finyelloa ka nako e le 'ngoe ka har'a lera le lesesaane la filimi, ho nolofatsa moralo le ts'ebetso ea tlhahiso ea sesebelisoa. Bokhoni bona ba ho kopanya ha bo ntlafatse ts'ebetso le ts'epahalo ea sesebelisoa feela empa hape bo fokotsa litšenyehelo tsa tlhahiso le ho rarahana. Ho nts'etsopele ea li-sensor tsa khatello, theknoloji ea filimi e tšesaane e ka ntlafatsa haholo ts'ebetso ea sensor, e ba lumella ho sebetsa ka mokhoa o tsitsitseng libakeng tse fapaneng tse rarahaneng.
Ho kopanngoa ha Theknoloji ea Thin-Film ho Li-Sensors tsa Khatello
Ho kopanngoa ha theknoloji ea filimi e tšesaane ho li-sensor tsa khatello e ikemiselitse ho ntlafatsa ts'ebetso, ho fokotsa boholo le ho eketsa kutlo. Ka ho laola ka nepo thepa ea thepa le botenya ba lera, theknoloji ea filimi e tšesaane e etsa hore nts'etsopele ea li-sensor tse nepahetseng haholo li khonehe. Ho kopanya hona ha ho ntlafatse ts'ebetso ea kakaretso ea li-sensor feela empa hape ho tlisa melemo ea bohlokoa likarolong tse 'maloa tsa bohlokoa.
Taba ea pele, theknoloji ea filimi e tšesaane e nolofalletsa li-sensor tse nyane. Li-sensor tse tloaelehileng tsa khatello hangata li tobana le mefokolo ea boholo le boima ba 'mele, athe theknoloji ea filimi e tšesaane e lumella ho etsoa ha lisele tse nyane, tse bobebe ntle le ho senya ts'ebetso. Sena se bohlokoa haholo bakeng sa lits'ebetso tse nang le sebaka se lekanyelitsoeng kapa tse hlokang litharollo tse bobebe, joalo ka lisebelisoa tsa bongaka le MEMS.
Taba ea bobeli, li-sensor tsa filimi e mosesaane li sebetsa hantle ho ntlafatsa kutlo. Theknoloji ea filimi e tšesaane e khona ho bona liphetoho tsa motsotsoana ka nepo e phahameng, e leng se etsang hore lisensara tsena li be molemo libakeng tse hlokang litekanyo tse nepahetseng. Ka mohlala, ho liindasteri tsa liindasteri le tlhokomelo ea tikoloho, li-sensor tsa khatello ea lifilimi tse tšesaane li ka fana ka lintlha tse nepahetseng, kahoo li ntlafatsa katleho ea tsamaiso le ho tšepahala.
Ho feta moo, theknoloji ea filimi e tšesaane e ntlafatsa ho tšepahala le ho tšoarella ha li-sensor tsa khatello. Ho lumellana ho phahameng le botsitso ba lihlopha tse tšesaane-filimi li netefatsa ts'ebetso e tsitsitseng ho feta tšebeliso ea nako e telele. Ha li bapisoa le li-sensor tsa setso, li-sensor tsa lifilimi tse tšesaane li ka boloka ts'ebetso e ntle esita le tlas'a maemo a feteletseng a tikoloho, e leng se etsang hore li sebelisoe haholo libakeng tse kang tsa lifofane le liindasteri tsa likoloi.
Ha ho bapisoa le mekhoa ea khale, theknoloji ea filimi e tšesaane e fana ka mefuta e meng e bobebe, e kopaneng le e hlokolosi haholo. Li-sensor tse tloaelehileng tsa khatello hangata li tobana le mathata ka boholo, boima le ho nepahala, athe theknoloji ea filimi e tšesaane, e nang le thepa ea eona e phahameng le mekhoa ea tlhahiso, e hlola mefokolo ena. Li-sensor tsa filimi e tšesaane ha li na melemo feela ka boholo le boima ba 'mele empa hape li feta haholo li-sensor tsa setso mabapi le ho nepahala le kutloelo-bohloko. Melemo ena e etsa hore theknoloji ea filimi e tšesaane e be karolo ea bohlokoa ea tsoelo-pele ea theknoloji ea morao-rao ea kutlo.
Lisebelisoa tsa Thin-Film Pressure Sensors
Khetho ea lisebelisoa bakeng sa li-sensor tsa khatello ea lifilimi tse tšesaane ke ea bohlokoa kaha lisebelisoa tsena li ama ts'ebetso le ts'epahalo ea li-sensor ka kotloloho.
Lisebelisoa tse Tloaelehileng
Lisebelisoa tse tloaelehileng tse sebelisoang ho li-sensor tsa khatello ea filimi e tšesaane li kenyelletsa litšepe tse kang khauta, platinum le aluminium, tse tsejoang ka conductivity ea tsona e babatsehang le ho hanyetsa ho bola. Khauta, e le thepa e tsamaisang haholo, e atisa ho sebelisoa likarolong tsa li-electrode tsa li-sensor ho netefatsa ho nepahala le botsitso ba phetisetso ea matšoao. Platinum, ka lebaka la botsitso ba eona bo botle ba mocheso le ho hanyetsa oxidation, e sebelisoa haholo ho li-sensor bakeng sa libaka tse phahameng tsa mocheso. Aluminium, kaha e bobebe ebile e na le conductivity e ntle, hangata e sebelisoa lits'ebetsong tsa sensor tse hlokang ho laola boima ba 'mele. Ho feta moo, lisebelisoa tsa semiconductor tse kang silicon le germanium li sebelisoa haholo ho li-sensor tsa khatello ea lifilimi tse tšesaane ka lebaka la thepa ea tsona e ntle ea mochini le kutlo, li bapala karolo ea bohlokoa ho MEMS.
Lisebelisoa tse tsoetseng pele
Ka nts'etsopele ea theknoloji, lisebelisoa tse tsoetseng pele joalo ka nanocomposites le graphene li ntse li fumana tlhokomelo e ntseng e eketseha bakeng sa ts'ebeliso ea tsona ho li-sensor tsa khatello ea lifilimi tse tšesaane. Lisebelisoa tsena li batlisisoa haholo bakeng sa thepa ea tsona e ntle haholo le bokhoni ba ho ntlafatsa ts'ebetso ea sensor. Li-nanocomposites li kopanya melemo ea lisebelisoa tse fapaneng, li fana ka matla a phahameng a mochine le conductivity, e ka ntlafatsang haholo kutlo ea kutlo le ho tšoarella. Graphene, ka sebopeho sa eona se nang le athomo e le 'ngoe le thepa e ikhethang ea motlakase, e nkuoa e le khetho e nepahetseng bakeng sa lisebelisoa tsa sensor tsa nakong e tlang. Ha se feela hore e na le ultra-high conductivity empa hape e bonts'a matla a matla a mochine le elasticity, e bontšang bokhoni bo boholo ho nts'etsopele ea li-sensor tsa khatello ea kelello ea ultra-sensitive.
Thepa ea Lintho
Khetho ea lisebelisoa bakeng sa li-sensor tsa khatello ea lifilimi tse tšesaane li ipapisitse le thepa ea tsona ea motlakase, ea mochini le ea mocheso ho netefatsa ts'ebetso e nepahetseng tlasa maemo a fapaneng a ts'ebetso. Ka mohlala, li-sensor tse sebelisoang libakeng tse phahameng tsa mocheso li hloka lisebelisoa tse nang le botsitso bo botle ba mocheso le ho hanyetsa oxidation, ha likopo tse hlokang kutloisiso e phahameng li nahana ka conductivity ea motlakase le mechanical elasticity modulus ea thepa. Ka ho hlahloba ka botlalo thepa ena ea thepa, baqapi ba ka khetha lisebelisoa tse loketseng ka ho fetisisa bakeng sa litlhoko tse khethehileng tsa kopo, ho netefatsa ho tšepahala le ho nepahala ha li-sensor libakeng tse sa tšoaneng tse rarahaneng.
Lintlha tsa Moqapi bakeng sa Li-Sensors tsa Khatello ea Filimi e Thin
Lintlha tsa moralo bakeng sa li-sensor tsa khatello ea filimi e tšesaane li ikemiselitse ho netefatsa ts'ebetso ea tsona, ts'epahalo le botsitso lits'ebetsong tse fapaneng.
Moralo oa Sebopeho
Moralo oa sebopeho sa li-sensor tsa khatello ea lifilimi tse tšesaane o tlameha ho netefatsa botsitso ba mochini le ho tiea ha o ntse o boloka kutlo le ho nepahala. Sena se hloka hore baqapi ba se ke ba nahana feela ka thepa ea 'mele ea filimi e tšesaane empa hape le mojaro oa mochine le khatello ea tikoloho lits'ebetsong tsa sebele. Moralo oa sebopeho sa sensor o lokela ho mamella likhatello tse fapaneng tsa mochini le liphetoho tsa tikoloho ha o ntse o boloka lets'oao le tsitsitseng la tlhahiso.
Kutloelo-bohloko
Sensitivity ke ntlha ea bohlokoa moralong oa li-sensor tsa khatello, tse susumetsoang ke khetho ea thepa, botenya ba lifilimi tse tšesaane le theknoloji ea tlhahiso. Li-sensor tse matla haholo li ka bona liphetoho tsa khatello ea motsotsoana, tse bohlokoa bakeng sa ho metha ka nepo le lits'ebetso tsa taolo. Khetho ea thepa e ama ka ho toba kutloisiso ea kutlo; lisebelisoa tse fapaneng li na le lisebelisoa tse fapaneng tsa mochini le motlakase, tse loketseng litlhoko tse fapaneng tsa kopo. Botenya ba filimi e tšesaane le bona ke ntlha ea bohlokoa; ha filimi e le mosesaane, e na le kutlo e phahameng, empa sena se ka fokotsa matla a mochine, ho hloka ho leka-lekana pakeng tsa kutloisiso le matla.
Ho Nepaha le ho Nepaha
Ho finyella ho nepahala ho phahameng le ho nepahala ha li-sensor tsa khatello ea filimi e tšesaane ho hloka moralo o hlokolosi le mekhoa ea tlhahiso ea ho etsa bonnete ba ho tšepahala le ho pheta-pheta. Sena se kenyelletsa ho laola ka nepo botenya le ho tšoana ha filimi e tšesaane, ho khetha li-substrates tse loketseng, le ho ntlafatsa lits'ebetso tsa tlhahiso. Phapang efe kapa efe e nyane ts'ebetsong ea tlhahiso e ka ama ts'ebetso ea sensor, ho etsa hore taolo e tiileng ea boleng le tlhahlobo e hlokehe.
Litšobotsi tsa Ts'ebetso Nako ea Karabelo
Li-sensor tsa khatello ea filimi e tšesaane hangata li na le nako ea karabelo e potlakileng, e bohlokoa bakeng sa lits'ebetso tse matla tse hlokang tlhahlobo ea khatello ea nako ea nnete. Nako ea karabelo e potlakileng e tiisa hore sensor e ka khona ho hapa liphetoho tsa khatello hanghang, e fana ka ts'ehetso ea data ea nako ea nnete bakeng sa lits'ebetso libakeng tse kang automation ea indasteri, lisebelisoa tsa bongaka le sebaka sa sefofane.
Ho tšoarella
Ho khetha lisebelisoa tse nepahetseng le ho sebelisa mekhoa e tšepahalang ea tlhahiso ho matlafatsa ho tšoarella ha li-sensor tsa khatello ea lifilimi tse tšesaane, ho netefatsa ts'epo ea nako e telele. Ho tšoarella ho bohlokoa bakeng sa ts'ebetso e tsitsitseng ea nako e telele ea li-sensor, haholo-holo tse sebetsang maemong a thata a tikoloho, joalo ka mocheso o phahameng, mongobo o phahameng kapa tikoloho e senyang.
Botsitso ba Tikoloho
Li-sensor tsa khatello ea filimi e tšesaane li tlameha ho boloka ts'ebetso e ts'oanang tlasa maemo a fapaneng a tikoloho, ho kenyeletsoa ho fetoha ha mocheso, mongobo le khatello ea mochini. Sena se hloka hore li-sensor li be le botsitso bo botle ba tikoloho, li tsebe ho sebetsa ka har'a mefuta e mengata ea mocheso, 'me li se ke tsa ameha ka liphetoho tsa mongobo le khatello ea mochine. Khetho ea thepa le moralo oa ho paka li phetha karolo ea bohlokoa ho netefatsa botsitso ba tikoloho ea li-sensor.
Lisebelisoa tsa Thin-Film Pressure Sensors
Indastering ea likoloi, li-sensor tsa khatello ea filimi e tšesaane li sebelisoa lits'ebetsong tsa ho shebella khatello ea mabili (TPMS) ho fana ka data ea nako ea 'nete ea khatello ea mabili, ho matlafatsa polokeho le ts'ebetso. Litsamaisong tsa taolo ea enjene, li-sensor tsena li lekola khatello ea mafura le moea, ho netefatsa ts'ebetso e nepahetseng ea enjene le katleho. Ho feta moo, lits'ebetso tsa polokeho ea likoloi joalo ka mekotla ea moea le li-braking system li itšetleha ka li-sensor tsa khatello ea lifilimi tse tšesaane bakeng sa tekanyo e nepahetseng ea khatello le ts'ebetso e nakong.
Lefapheng la bongaka, li-sensor tsa khatello ea lifilimi tse tšesaane li sebelisoa ho li-monitor tsa khatello ea mali, ho fana ka litekanyo tse nepahetseng le tse sa tsitsang tse hlokahalang bakeng sa tlhokomelo ea mokuli le ho hlahlojoa. Li boetse li sebelisoa ho li-sensor tse kentsoeng bakeng sa tlhahlobo e tsoelang pele ea 'mele, ho ntlafatsa liphetho tsa kalafo ea mokuli. Lisebelisoa tsa bongaka tse aparoang, joalo ka li-trackers tsa boikoetliso le limonita tsa bophelo bo botle, li sebelisa lisensara tsena ho latela matšoao a bohlokoa le mesebetsi ea 'mele.
Lefapheng la lifofane, li-sensor tsa khatello ea lifilimi tse tšesaane li sebelisoa bakeng sa ho lekola khatello ea li-cabin, ho netefatsa khatello e nepahetseng ea kamore bakeng sa boiketlo le polokeho ea bapalami. Li boetse li sebelisoa bakeng sa tlhahlobo ea bophelo bo botle, e khonang ho bona mathata a ka bang teng pele a ba matla. Ho feta moo, li-sensor tsena li bohlokoa lits'ebetsong tsa taolo ea tikoloho ea sepakapaka, ho netefatsa maemo a tsitsitseng bakeng sa basebetsi le lisebelisoa.
Lits'ebetsong tsa indasteri, li-sensor tsa khatello ea lifilimi tse tšesaane li sebelisoa bakeng sa taolo e nepahetseng ea ts'ebetso, ho netefatsa ts'ebetso e nepahetseng le katleho. Sistimi ea liroboto e itšetleha ka li-sensor tsena bakeng sa maikutlo a tactile le ho utloa khatello, ho ntlafatsa ts'ebetso le bokhoni ba tsona. Mekhoa ea ts'ireletso ea indasteri e boetse e sebelisa li-sensor tsa khatello ea filimi e tšesaane ho lemoha le ho arabela liphetohong tsa khatello, ho thibela likotsi le ho netefatsa polokeho ea basebetsi.
Lipotso Tse Botsoang Khafetsa
Melemo ea mantlha ea li-sensor tsa khatello ea lifilimi tse tšesaane ke life?
Li-sensor tsa khatello ea filimi e tšesaane li fana ka kutlo e phahameng, miniaturization, le ts'epo e ntlafalitsoeng, e etsa hore e be tse loketseng lits'ebetso tse fapaneng. Boikutlo ba bona bo phahameng bo ba lumella ho bona liphetoho tsa khatello ea metsotso, moralo o monyenyane o ba etsa hore ba tšoanelehe bakeng sa lits'ebetso tse thibelang sebaka, 'me botšepehi bo ntlafetseng bo tiisa ts'ebetso e tsitsitseng ea nako e telele libakeng tse thata.
Li-sensor tsa khatello ea lifilimi tse tšesaane li fapana joang le li-sensor tsa setso?
Lisensara tsa khatello ea filimi e tšesaane li nepahetse, li kopane, 'me ka kakaretso li tšoarella ho feta lisensara tse ngata tse tloaelehileng. Li fana ka ts'ebetso e betere lits'ebetsong tse batloang haholo, li khona ho sebetsa ka har'a mefuta e fapaneng ea mocheso le likhatello, 'me li na le kutlo e phahameng le lebelo la karabo. Litšobotsi tsena li etsa hore li-sensor tsa lifilimi tse tšesaane li ipabole lits'ebetsong tse ngata tse batloang haholo.
Ke lisebelisoa life tse sebelisoang hangata ho li-sensor tsa khatello ea filimi e tšesaane?
Lisebelisoa tse tloaelehileng li kenyelletsa litšepe tse kang khauta le platinum, li-semiconductors tse kang silicon, le lisebelisoa tse tsoetseng pele tse kang graphene. Khauta le platinamo li sebelisoa haholo bakeng sa conductivity ea tsona e ntle haholo le ho hanyetsa kutu ho li-electrode tsa sensor. Silicon e sebelisoa hangata lifiliming tse tšesaane tsa semiconductor ka lebaka la thepa ea eona e ntle ea mochini le litšoaneleho tsa elektroniki, athe graphene e nkuoa e le khetho e nepahetseng bakeng sa lisebelisoa tsa sensor tsa nakong e tlang ka lebaka la thepa ea eona e ikhethang ea motlakase le matla a mochini.
Ke liindasteri life tse ruang molemo haholo ho lisensara tsa khatello ea filimi e tšesaane?
Liindasteri tsa likoloi, tsa bongaka, tsa lifofane, tsa lisebelisoa tsa elektroniki le tsa indasteri li rua molemo haholo ho lisensara tsa khatello ea lifilimi tse tšesaane. Indastering ea likoloi, li-sensor tsena li sebelisetsoa ho lekola khatello ea mabili le taolo ea enjene; lefapheng la bongaka, li sebelisetsoa ho hlahloba khatello ea mali le li-sensor tse kenngoang; Lefapheng la lifofane, li sebelisetsoa ho lekola khatello ea khabinete le tlhokomelo ea bophelo bo botle; ho lisebelisoa tsa elektroniki tsa bareki, li ntlafatsa boiphihlelo ba basebelisi ba lisebelisoa tse bohlale; le ho li-automation tsa indasteri, li sebelisoa bakeng sa taolo ea ts'ebetso le liroboto.
Ke mekhoa efe ea tlhahiso e sebelisetsoang li-sensor tsa khatello ea filimi e tšesaane?
Mekhoa e tloaelehileng e kenyelletsa sputtering, chemical vapor deposition (CVD), physical vapor deposition (PVD), le atomic layer deposition (ALD). Mekhoa ena e ka laola ka nepo botenya, ho tšoana, le sebopeho sa filimi e tšesaane, ho netefatsa ts'ebetso ea sensor le ho ts'epahala. Sputtering ke mokhoa o sebelisoang haholo oa ho beha mouoane oa 'mele bakeng sa ho hlahisa lifilimi tse tšesaane tsa tšepe; Mekhoa ea CVD le PVD e atisa ho sebelisoa bakeng sa ho kenya li-semiconductors le thepa ea ho sireletsa; ALD e ka laola botenya ba lifilimi tse tšesaane boemong ba athomo, tse loketseng ho lokisetsa lifilimi tse tšesaane haholo.
Litšupiso:
1.Ohring, M. (2001). "Materials Science of Thin Films." Khatiso ea Thuto.
Nako ea poso: Jun-28-2024